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High Resolution Schottky Scanning Electron Microscope

High Resolution Schottky Scanning Electron Microscope

Introduction:

High Resolution Schottky Scanning Electron Microscope(FE-SEM) utilizes a high-energy electron beam to bombard a specimen, receiving the resulting signals to generate images. This enables high-magnification and high-resolution microscopic observation as well as rapid elemental composition analysis. It is widely applicable across various fields, including geology, biology, medicine, zoology, materials science, physics, chemistry, mechanical engineering, metallurgy, electrical engineering, and semiconductors.


Instrument Description:

  • Model: Hitachi SU3900

  • EDS System: AZtecLive Standard with Ultim Max 40

Specifications:

Ⅰ. Accelerating Voltage: 0.5–30 kV
Ⅱ. Electron Source: Thermal Field-Emission Electron Gun
Ⅲ. Magnification Range: 5× to 800,000×
Ⅳ. High-Resolution Imaging Capabilities (in high vacuum mode):

  • 0.9 nm at 30 kV

  • 2.5 nm at 1 kV

  • 1.6 nm at 1 kV (with deceleration mode enabled)
    Ⅴ. EDS Analysis: Capable of detecting elements with atomic numbers ≥5 and ≤92
    Ⅵ. Automatic Functions: Auto-focus, astigmatism correction, brightness, and contrast adjustment

Main Accessories:

Ⅰ. EDS System: For qualitative and quantitative analysis of chemical elements and elemental mapping


Sample Preparation Guidelines:

  1. Sample Size: Maximum sample height should not exceed 8 cm; diameter should be less than 20 cm.

  2. Vacuum Compatibility: To avoid contamination in the ultra-high vacuum chamber, samples must not be volatile, contaminating, magnetic powders, or contain moisture.

  3. First-Time Users: First-time users must consult with the instrument technician regarding sample preparation prior to observation.

    Instrument Usage Fees (Tentatively open for external reservations by the end of July)

    1. External User Operation (by staff):

      • NT$2,000 per hour

      • NT$5,500 for 3 hours

    2. EDS Analysis (Point/Area):

      • NT$50 per spot/area

    3. Elemental Mapping:

      • NT$100 per area

    4. Gold Coating: