Field-Emission Scanning Electron Microscope

Introduction:
A field emission scanning electron microscope (FE-SEM) operates by applying a negative voltage to a metallic tip, generating an electric field that extracts electrons from the tip, forming an extremely fine electron beam. It functions under ultra-high vacuum conditions (approximately 10⁻¹⁰ torr), enabling the acquisition of high-resolution images. With the advancement of science and technology, nanoscience and nanotechnology have become central pillars of national high-tech development due to their ability to meet the demands of miniaturization. By controlling material composition and interfacial structures within the 1–100 nanometer scale and observing resulting changes in physical, chemical, and biological properties, various industrial applications can be developed. The FE-SEM serves as one of the most essential tools for measuring and manipulating nanostructures.

Instrument Description:

Model: Hitachi-S4700
EDS System: HORIBA

Ⅰ. Acceleration Voltage: 0.5–30 kV
Ⅱ. Electron Source: Cold Field Emission Gun
Ⅲ. Magnification Range: 30X ~ 500,000X
Ⅳ. High-Resolution Imaging: Resolution: 1.5 nm
Ⅴ. EDS Analysis Capability: Detectable elements with atomic numbers ≥ 5 and ≤ 92
Ⅵ. Auto Functions: Autofocus, aberration correction, brightness, and contrast adjustment

Main Accessories:
Ⅰ. EDS (Qualitative, quantitative, and distribution imaging analysis of chemical elements)

Sample Preparation Guidelines:

Sample Size: The specimen height must not exceed 0.8 cm, and the size must be smaller than a 3.2 cm diameter.
Contamination Prevention: To avoid contamination of the ultra-high vacuum, samples must not contain volatile, contaminant, magnetic powders, or moisture.
First-Time Users: First-time users must consult with a technical staff member about sample preparation before observation.

Instrument Usage Fees:

External Service Operation: NT$1,600/hour or NT$4,500/3 hours
EDS Point/Area Analysis: NT$50 per location
EDS Mapping: NT$100 per location
Gold Coating: NT$200 per 60 seconds

Instrument Manager: Ms. Hsiu-Feng Tsao
Phone/Extension: +886-7-6577711 ext. 3986
Location: Room 2101, 1st Floor, College of Engineering, Main Campus

Reservation:(Click here to make a reservation)
First-time external users must register for an account before making a reservation