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About US
Introduction
Center's instruments
Reservation service
Payment method

About US

Introduction

Center's instruments

Reservation service

Payment method

Scanning Electron Microscope

Scanning Electron Microscope

Introduction:

A Scanning Electron Microscope (SEM) primarily uses a finely focused electron beam to scan the surface of a sample. The interactions between the electron beam and the sample generate various signals, enabling high-resolution imaging of surface structures and rapid material composition analysis. This SEM is also equipped with a YAG BSE Detector, allowing imaging using Backscattered Electrons (BSE).

Instrument Description:

  • Model: Hitachi S-3400N

  • EDS System: HORIBA

Specifications:

Ⅰ. Accelerating Voltage: 0.5 – 30 kV
Ⅱ. Electron Source: Tungsten Filament
Ⅲ. Magnification Range: 35× to 50,000×
Ⅳ. Resolution: 1.5 nm
Ⅴ. EDS Analysis Capability: Elements with atomic numbers between 5 and 92
Ⅵ. Automatic Functions: Auto-focus, astigmatism correction, brightness, and contrast adjustment

Main Accessories:

Ⅰ. EDS (Energy Dispersive Spectrometer): For qualitative, semi-quantitative, and elemental mapping analyses

Available Services:

  • SEI (Scanning Electron Image): Surface structure observation, fracture surface analysis, thin film and coating inspection

  • BEI (Backscattered Electron Image): Imaging using backscattered electrons

  • EDS (Energy Dispersive Spectrometer): Micro-area elemental analysis, semi-quantitative analysis, line scan, and elemental mapping

Sample Preparation Guidelines:

  1. Sample Size: Maximum sample height should not exceed 0.8 cm; diameter must be less than 3.2 cm

  2. Vacuum Compatibility: To avoid contamination of the ultra-high vacuum system, samples must not be volatile, contaminating, magnetic powders, or contain any moisture

  3. First-Time Users: First-time users must consult with the instrument technician regarding sample preparation before observation

Instrument Usage Fees:

  1. External User Operation (by staff):

    • NT$1,300 per hour

    • NT$3,500 for 3 hours

  2. EDS Analysis (Point/Area):

    • NT$50 per spot/area

  3. Elemental Mapping:

    • NT$100 per area

  4. Gold Coating:

    • NT$200 per 60 seconds


      Instrument Manager: Ms. Hsiu-Feng Tsao

      Phone/Extension: +886-7-6577711 ext. 3986

      Location: Room 2101, 1st Floor, College of Engineering, Main Campus


      Reservation:(Click here to make a reservation)

      First-time external users must register for an account before making a reservation